Novel GaN-based double-channel p-heterostructure field-effect transistors with a p-GaN insertion layer

被引:0
作者
Niu, Xuerui [1 ]
Hou, Bin [1 ]
Zhang, Meng [1 ]
Yang, Ling [1 ]
Wu, Mei [1 ]
Zhang, Xinchuang [2 ]
Jia, Fuchun [1 ]
Wang, Chong [1 ]
Ma, Xiaohua [1 ]
Hao, Yue [1 ]
机构
[1] Xidian Univ, Sch Microelect, Key Lab Wide Band Gap Semicond Mat & Devices, Xian 710071, Peoples R China
[2] Xidian Univ, Sch Adv Mat & Nanotechnol, Xian 710071, Peoples R China
基金
中国国家自然科学基金; 中国博士后科学基金;
关键词
GaNa; double-channel heterostructure field-effect transistors; p-GaN insertion layer; C-doped buffer layer; ALGAN/GAN; HEMTS;
D O I
10.1088/1674-1056/acc7f4
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
GaN-based p-channel heterostructure field-effect transistors (p-HFETs) face significant constraints on on-state currents compared with n-channel high electron mobility transistors. In this work, we propose a novel double heterostructure which introduces an additional p-GaN insertion layer into traditional p-HFETs. The impact of the device structure on the hole densities and valence band energies of both the upper and lower channels is analyzed by using Silvaco TACD simulations, including the thickness of the upper AlGaN layer and the doping impurities and concentration in the GaN buffer layer, as well as the thickness and Mg-doping concentration in the p-GaN insertion layer. With the help of the p-GaN insertion layer, the C-doping concentration in the GaN buffer layer can be reduced, while the density of the two-dimensional hole gas in the lower channel is enhanced at the same time. This work suggests that a double heterostructure with a p-GaN insertion layer is a better approach to improve p-HFETs compared with those devices with C-doped buffer layer alone.
引用
收藏
页数:6
相关论文
共 50 条
  • [31] Influence of the channel electric field distribution on the polarization Coulomb field scattering in AlGaN/AlN/GaN heterostructure field-effect transistors
    Yu, Yingxia
    Lin, Zhaojun
    Luan, Chongbiao
    Lv, Yuanjie
    Feng, Zhihong
    Yang, Ming
    Wang, Yutang
    Chen, Hong
    AIP ADVANCES, 2013, 3 (09)
  • [32] A low turn-on voltage AlGaN/GaN lateral field-effect rectifier compatible with p-GaN gate HEMT technology
    Wang, Fangzhou
    Chen, Wanjun
    Wang, Zeheng
    Wang, Yuan
    Lai, Jingxue
    Sun, Ruize
    Zhou, Qi
    Zhang, Bo
    SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 2021, 36 (03)
  • [33] Influence of gate width on gate-channel carrier mobility in AlGaN/GaN heterostructure field-effect transistors
    Yang, Ming
    Ji, Qizheng
    Gao, Zhiliang
    Zhang, Shufeng
    Lin, Zhaojun
    Yuan, Yafei
    Song, Bo
    Mei, Gaofeng
    Lu, Ziwei
    He, Jihao
    SUPERLATTICES AND MICROSTRUCTURES, 2017, 111 : 65 - 72
  • [34] Effect of polarization Coulomb field scattering on device linearity in AlGaN/GaN heterostructure field-effect transistors
    Cui, Peng
    Lv, Yuanjie
    Lin, Zhaojun
    Fu, Chen
    Liu, Yan
    JOURNAL OF APPLIED PHYSICS, 2017, 122 (12)
  • [35] Plasma-assisted ohmic contact for AlGaN/GaN heterostructure field-effect transistors
    Zhang, Jiaqi
    Wang, Lei
    Wang, Qingpeng
    Jiang, Ying
    Li, Liuan
    Zhu, Huichao
    Ao, Jin-Ping
    SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 2016, 31 (03)
  • [36] Output power enhancement in AlGaN/GaN heterostructure field-effect transistors with multilevel metallization
    Oh, Seung Kyu
    Jang, Taehoon
    Pouladi, Sara
    Jo, Young Je
    Ko, Hwa-Young
    Ryou, Jae-Hyun
    Kwak, Joon Seop
    APPLIED PHYSICS EXPRESS, 2017, 10 (01)
  • [37] Negative transconductance effect in p-GaN gate AlGaN/GaN HEMTs by traps in unintentionally doped GaN buffer layer
    葛梅
    蔡青
    张保花
    陈敦军
    胡立群
    薛俊俊
    陆海
    张荣
    郑有炓
    Chinese Physics B, 2019, 28 (10) : 508 - 513
  • [38] Effect of Gan Interlayer Thickness on the Algan/Gan Heterostructure Field-Effect Transistors for Self-Terminated Wet Etching Process
    Li, Liuan
    He, Liang
    Yang, Fan
    Chen, Zijun
    Zhang, Xiaorong
    He, Lei
    Wu, Zhisheng
    Zhang, Baijun
    Liu, Yang
    2016 13TH CHINA INTERNATIONAL FORUM ON SOLID STATE LIGHTING: INTERNATIONAL FORUM ON WIDE BANDGAP SEMICONDUCTORS CHINA (SSLCHINA: IFWS), 2016, : 68 - 71
  • [39] Negative transconductance effect in p-GaN gate AlGaN/GaN HEMTs by traps in unintentionally doped GaN buffer layer
    Ge, Mei
    Cai, Qing
    Zhang, Bao-Hua
    Chen, Dun-Jun
    Hu, Li-Qun
    Xue, Jun-Jun
    Lu, Hai
    Zhang, Rong
    Zheng, You-Dou
    CHINESE PHYSICS B, 2019, 28 (10)
  • [40] On-Chip Integrated High-Sensitivity Temperature Sensor Based on p-GaN/AlGaN/GaN Heterostructure
    Chang, Jie
    Yin, Yulian
    Du, Jiahong
    Wang, Huan
    Li, Haoran
    Zhao, Changhui
    Li, Hui
    Hu, Cungang
    Cao, Wenping
    Tang, Xi
    Yang, Shu
    IEEE ELECTRON DEVICE LETTERS, 2023, 44 (04) : 594 - 597