共 36 条
[5]
FRAGMENTATION OF VALENCE ELECTRONIC STATES OF SF6(+) STUDIED WITH SYNCHROTRON RADIATION
[J].
JOURNAL OF THE CHEMICAL SOCIETY-FARADAY TRANSACTIONS,
1991, 87 (09)
:1287-1292
[6]
Plasma etching: Yesterday, today, and tomorrow
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A,
2013, 31 (05)
[9]
ELECTRON-IMPACT CORE EXCITATION OF SF6 .1. S-2P, S-2S, AND F-1S SPECTROSCOPY
[J].
PHYSICAL REVIEW A,
1995, 52 (06)
:4665-4677
[10]
Electron impact scattering by SF6 molecule over an extensive energy range
[J].
RSC ADVANCES,
2014, 4 (58)
:30953-30962