Discharge-Pumped Excimer Laser Technologies and Applications

Excimer laser is a kind of deep-ultraviolet laser source with high power output, which has unique applications in many aspects. However, there is still a gap between the domestic excimer laser industry and foreign countries in key technologies and high-end products, and there is a situation of stuck neck. First, this paper introduces the basic characteristics, application classification, briefly development and status of excimer laser. Second, the basic structure and some key technologies of practical devices of discharge-pumped excimer laser are introduced, including fast pulse excitation source, gas discharge cavity, optical resonator and so on. Finally, the main applications and progress of discharge-pumped excimer laser in industry, medical treatment, scientific research, and other fields are introduced, as well as some unique key technologies.