Crystallization of NiTi shape memory alloy sputtering-deposition film

被引：0

作者：

QIU Ping shan邱平善 SONG Run bin宋润滨 HUANG Wei xin黄渭馨 LI Yun xi李运稀 WANG Gui song王桂松 YU Wei dong于伟东 College of Mechanical and Power Engineering Harbin University of Science and Technology Harbin PRChina ^{[150080
]}

机构：

来源：

TransactionsofNonferrousMetalsSocietyofChina | 2000年 / 03期

关键词：

sputtering deposition films; crystallization; shape memory alloys;

D O I：

暂无

中图分类号：

TG139.6 [];

学科分类号：

080502 ;

摘要：

The crystallization of NiTi shape memory alloy sputter deposition film in the course of sputtering deposition and that after heat treated were studied. The relationship between the process factors, such as substrate type, temperature, as well as the crystallization when heat treated after plating was investigated. The results show that a new phase precipitates during heat treatment after sputtering deposition and the degree of crystallization among different layers and the stress in grains are obviously different.

引用

页码：320 / 323

页数：4

共 8 条

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