Structural and optical properties of Zn-doped β-GaO films

被引：2
作者：
岳伟
闫金良
吴江燕
张丽英
机构：
[1] School of Physics
[2] Ludong University
来源：
半导体学报 | 2012年 / 33卷 / 07期
关键词：
transparent conductive oxides; Zn-dopedβ-Ga2O3; optical transmittance; optical band gap; photoluminescence;
D O I：
暂无
中图分类号：
O484.1 [薄膜的生长、结构和外延];
学科分类号：
080501 ; 1406 ;
摘要：
<正>Intrinsicβ-Ga2O3 and Zn-dopedβ-Ga2O3 films were prepared using RF magnetron sputtering.The effects of the Zn doping and thermal annealing on the structural and optical properties are investigated.In comparison with the intrinsicβ-Ga2O3 films,the microstructure,optical transmittance,optical absorption,optical energy gap,and photoluminescence of Zn-dopedβ-Ga2O3 films change significantly.The post-annealedβ-Ga2O3 films are polycrystalline.After Zn doping,the crystallization deteriorates,the optical band gap shrinks,the transmittance decreases and the UV,blue,and green emission bands are enhanced.
引用
收藏
页码：20 / 23
页数：4
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