Temperature Dependence of Electrical Characteristics in Indium-Zinc-Oxide Thin Film Transistors from 10 K to 400 K

被引:0
|
作者
刘远
王黎
蔡述庭
陈雅怡
陈荣盛
熊晓明
耿魁伟
机构
[1] School of Automation, Guangdong University of Technology
[2] School of Electronic and Information Engineering, South China University of Technology
[3] Key Laboratory of Silicon Device Technology, Chinese Academy of Sciences
基金
中国国家自然科学基金;
关键词
In; exp; Temperature Dependence of Electrical Characteristics in Indium-Zinc-Oxide Thin Film Transistors from 10 K to 400 K;
D O I
暂无
中图分类号
TN321.5 [];
学科分类号
0805 ; 080501 ; 080502 ; 080903 ;
摘要
The transfer characteristics of amorphous indium-zinc-oxide thin film transistors are measured in the temperature range of 10–400 K. The variation of electrical parameters(threshold voltage, field effect mobility, sub-threshold swing, and leakage current) with decreasing temperature are then extracted and analyzed. Moreover, the dominated carrier transport mechanisms at different temperature regions are investigated. The experimental data show that the carrier transport mechanism may change from trap-limited conduction to variable range hopping conduction at lower temperature. Moreover, the field effect mobilities are also extracted and simulated at various temperatures.
引用
收藏
页码:104 / 107
页数:4
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