Interface State of Diamond Films Vapor-grown on Si and Mo Substrates

被引：0
|
作者：
毛友德
杨国伟
机构：
[1] Hefei University of Technology Hefei 230009 PRC
[2] Hefei University of Technology Hefei 230009 PRC
来源：
ChineseScienceBulletin | 1993年 / 23期
关键词：
diamond film; hot filament CVD; interlayer;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
1 Introduction The interface state between a diamond film and a substrate is very important for the vapor depositon of diamond films. It not only has a close relation with the mechanism of nucleation and growth of diamond, but also affects adhesion properties of diamond films to substrates. In recent years, the interface state of diamond films grown on Si substrates has been investigated. It is considered that there is an interlayer between dia-
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页码：1944 / 1948
页数：5
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