Analysis of surface damage produced by pulsed laser ablation on metal Al and semiconductor Si

被引：1
|
作者：
Man Bao-Yuan
Liu Ai-Hua and Wang Xiang-Tai(Department of Physics
机构：
来源：
Nuclear Science and Techniques | 1998年 / 02期
关键词：
Laser damage; Thermal stress; Shock pressure;
D O I：
暂无
中图分类号：
TN24 [激光技术、微波激射技术];
学科分类号：
0803 ; 080401 ; 080901 ;
摘要：
The surface morphological changes produced by Nd:YAG pulsed laser ablation of metal Al and semiconductor Si were carefully examined and analyzed by using scanning electron microscope. The formation mechanism of the droplets was discussed, and the reasons for formation of the microcracks on the laser irradiated area of the target surface were analyzed by calculating the thermal stress, the vapor pressure and the shock pressure induced by the laser supported detonation.
引用
收藏
页码：98 / 101
页数：4
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