A novel fabrication approach for an athermal arrayed-waveguide grating

被引：1

作者：

周天宏 ^{[1
]}

马卫东 ^{[1
]}

机构：

[1] Accelink Technologies Co,Ltd

来源：

半导体学报 | 2010年 / 01期

关键词：

AWG; optical waveguide filter; planar lightwave circuit; wavelength division multiplexing;

D O I：

暂无

中图分类号：

TN253 [光纤元件];

学科分类号：

0702 ; 070207 ;

摘要：

A novel method for fabricating an athermal AWG is proposed,using a unique apparatus for ITU-T center wavelength adjustment and optical coupling of two cut-parts.UV adhesive or sticky gel is applied into the gap between the cut-elements and the alignment base substrate by capillary infiltration.The spectrum profiles are almost the same as those of the original chip state,and no deterioration is observed resulting from athermalization.Flat-top athermal AWG modules of 100 GHz×40 ch are fabricated.Over a temperature range of-40 to 85℃,the center wavelength shift is±22 pm,and the insertion loss change is less than±0.11 dB.

引用

页码：39 / 41

页数：3