Optimization Design of Silicon Micro - capacitive Accelerometer with PWM Technique

被引：0
作者：
WU Ying
机构：
来源：
Semiconductor Photonics and Technology | 1999年 / 04期
关键词：
Capacitive Accelerometer; PWM Modulation; Silicon Micromachine;
D O I：
暂无
中图分类号：
TN379.02 [];
学科分类号：
0805 ; 080501 ; 080502 ; 080903 ;
摘要：
The property of silicon micro-capacitive accelerometer is analyzed and discussed by establishing the model of the sensor,to lay a basis for optimization design of sensor system structure. Discussed issues include the static modeling and dynamic behavior of the two commonly used structures,i.e., double-cantilever supported and four-beam supported structures, and also the measurement range of these devices.
引用
收藏
页码：193 / 197 +228
页数：6
相关论文
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  • [2] Van Kampen RP,Wolffenbuttel RF.Modeling the mechanical behavior of bulk - micromachined siliconaccelerometers. Sensors and Actuators . 1998
  • [3] Kuehnel W.Modelling ofthe mechanicalbehaviorofa differentialcapacitoracceleration sensor. Sensors and Actuators . 1995
  • [4] YU Maohong,WANG Huixiong.Mechanics of materials. . 1986
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