Three-Dimensional Modeling of Argon Discharge Characteristics of a Large-Scale Rectangular Surface-Wave Plasma Source

被引：0

作者：

蓝朝晖 ^{[1
]}

胡希伟 ^{[2
]}

王文斗 ^{[1
]}

刘明海 ^{[3
]}

机构：

[1] Institute of Fluid Physics, China Academy of Engineering Physics

[2] College of Electrical and Electronic Engineering, Huazhong University of Science and Technology

[3] College of Electrical and Electronic Engineering, Huazhong University of Science and Technology

来源：

Plasma Science and Technology | 2010年 / 02期

关键词：

surface wave plasma; electron density distribution; electron temperature distribution;

D O I：

暂无

中图分类号：

O461.2 [各类型放电];

学科分类号：

摘要：

A three-dimensional fluid model for surface-wave plasma (SWP), to investigate thedischarge characteristics of a rectangular SWP source working in a steady state, was presented.The simulation is performed for different gas pressures in argon and different deposited powers.The results showed that there is a peak of plasma density at a distance of 2 cm to 3 cm from theplasma-quartz interface whose position depends mainly on the gas pressure but not the depositedpower. The spatial distributions of plasma parameters and their dependence on the gas pressureand deposited power are also presented and discussed. Using this model a good agreement betweenthe simulation results and the available experimental data is obtained.

引用

页码：129 / 133

页数：5

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