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- [22] New precursors for the chemical vapor deposition of rhodium group thin films ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 2009, 238
- [30] Growth of epitaxial cubic SiC thin films using single source precursors SILICON CARBIDE, III-NITRIDES AND RELATED MATERIALS, PTS 1 AND 2, 1998, 264-2 : 187 - 190