Modeling of subthreshold characteristics for undoped and doped deep nanoscale short channel double-gate MOSFETs
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靳晓诗
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刘溪
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吴美乐
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School of Information Science and Engineering,Shenyang University of TechnologySchool of Information Science and Engineering,Shenyang University of Technology
吴美乐
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揣荣岩
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Jung-Hee Lee
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Jong-Ho Lee
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School of EECS Eng.and ISRC(Inter-University Semiconductor Research Center),Seoul National UniversitySchool of Information Science and Engineering,Shenyang University of Technology
Jong-Ho Lee
[3
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[1] School of Information Science and Engineering,Shenyang University of Technology
[2] School of EECS,Kyungpook National University
[3] School of EECS Eng.and ISRC(Inter-University Semiconductor Research Center),Seoul National University
A model of subthreshold characteristics for both undoped and doped double-gate(DG) MOSFETs has been proposed.The models were developed based on solution of 2-D Poisson’s equation using variable separation technique.Without any fitting parameters,our proposed models can exactly reflect the degraded subthreshold characteristics due to nanoscale channel length.Also,design parameters such as body thickness,gate oxide thickness and body doping concentrations can be directly reflected from our models.The models have been verified by comparing with device simulations’ results and found very good agreement.
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页码:27 / 30
页数:4
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