F-containing polymer was coated on the magnetic head of hard disc drive (HDD) as theultra-thin (<20(?)) film of anti-wetting agent (AWA). A static TOF-SIMS method has been applied tomeasuring the thickness and coating uniformity of the ultra-thin film. TOF- SIMS is also used tostudy the micro-tribology and transfer of lubricant between the magnetic head and media interface.