Design of a long range nano-scale resolution mechanism

被引：0

作者：

Shuo Hung CHANG ^{[1
]}

Jen Bon LEE ^{[1
]}

机构：

[1] Department of Mechanical Engineering,National Taiwan University

来源：

Journal of Zhejiang University-Science A(Applied Physics & Engineering) | 2010年 / 11卷 / 04期

关键词：

Coarse-fine dual stage; Nano-scale resolution; Piezoelectric (PZT) actuator;

D O I：

暂无

中图分类号：

TB383.1 [];

学科分类号：

070205 ; 080501 ; 1406 ;

摘要：

This paper presents the development of a coarse-fine dual precision positioning stage to achieve long travel range and high accuracy.The fine stage is arranged in series with a coarse stage.The key in the fine stage design is the choice of a toggle mechanism for a tight mechanical loop with high stiffness and compactness.We designed the toggle mechanism for reduction of the displacement to suppress signal noises.The performance of the coarse and fine stages was verified with an optical encoder and capacitive sensor,respectively.The measurement results show that the dual mechanism has a travel range of 1 mm and resolution of 30 nm.

引用

页码：250 / 254

页数：5