A new touch mode capacitive pressure sensor with two deformable diaphragms

被引：1
|
作者：
JIAO Yu zhong State Key Lab of Optical Technologies for MicrofabricationInstitute of Optics and Electronics Chinese Academy of SciencesChengdu China [610209 ]
机构：
来源：
微纳电子技术 | 2003年 / Z1期
关键词：
TMCPS; DDTMCPS; linearity; sensitivity;
D O I：
10.13250/j.cnki.wndz.2003.z1.146
中图分类号：
TP212 [发送器（变换器）、传感器];
学科分类号：
080202 ;
摘要：
To achieve the characteristics of better linearity, a new type of touch mode capacitive pressure sensor named as DDTMCPS is devised, which has a pair of deformable sensing diaphragms. Compared to present touch mode capacitive pressure sensors, the new sensor is characterized by better linearity, and large linear operation range. Such a device also has high sensitivity, and other advantages of normal touch mode capacitive pressure sensor. In the case of such a novel sensor, the second diaphragm served as bottom electrode plays great roles in modifying the deflection of the first diaphragm served as top electrode, furthermore optimizing the performance of touch mode sensors. Silicon fusion bonding technology is advised to fabricate the novel device.
引用
收藏
页码：492 / 495
页数：4
相关论文
共 4 条
  • [1] Si-to-Si fusion bonded touch mode capacitive pressure sensors. WANG Q,KO W H. Mechatronics . 1998
  • [2] Touch mode capacitive pressure sensors and interface circuits. WANG Q. . 1998
  • [3] Touch mode capacitive pressure sensors. KO W H,WANG Q. Sensors and Actuators . 1999
  • [4] A monolithically integrated surface micromachined touch mode capacitive pressure sensor. GUO S W,GUO J,KO W H. Sensors and Actuators . 2000
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