BOND STRUCTURE OF HYDROGENATED DIAMOND LIKE CARBON FILMS DEPOSITED BY PLASMA BASED ION IMPLANTATION

被引：0
作者：
G.Li
机构：
来源：
ActaMetallurgicaSinica(EnglishLetters) | 1999年 / 04期
关键词：
hydrogenated DLCfilms; core level band; valence band; Raman spec troscopy; PBII;
D O I：
暂无
中图分类号：
TG174.4 [金属表面防护技术];
学科分类号：
080503 ;
摘要：
The bondstructureofhydrogenated diamond likecarbon( DLC) filmsdeposited with plasmabased ionimplantation ( PBII) wascharacterized by Raman spectroscopy andcore level band and valenceband spectrum of XPS. Theresultsshow thatthe hydrogenated carbon filmspre pared with lower pulse bias, especially zero bias, display polymer like feature. The DLCfilms deposited with 15 kVpulsebiascontainsthehighestdensityofsp3 bonds. Thecore lev elband ( C1s) spectra of allfilmsshifttowardlow bindingenergy after4kVAr+ ion bom barding. The valenceband spectra of hydrogenated DLCfilmsarequite differentfrom thatof diamond and graphite. However, afterion bombarding, besidetwosingle peaksatabout17 0 eVand 12 5 eV(similarto graphite) ,two new sharp peaksappearatabout21 3 eVand 8 0 eV,respectively. Thepeak at8 0 eVcan beconsidertothecontribution duetothe actingofimplanted argon on C Cbondsand C Hbondsin thefilms.
引用
收藏
页码：551 / 556
页数：6
相关论文
共 50 条
[21]   Influence of Nitrogen on Hydrogenated Amorphous Carbon Thin Films Deposited by Plasma Focus Device [J].
A. Ghorbani ;
A. Sadighzadeh ;
M. Seifi ;
S. M. Sadat Kiai ;
A. Raeisdana .
Journal of Fusion Energy, 2018, 37 :95-102
[22]   Analysis of nitrogen-doped ion-beam-deposited hydrogenated diamond-like carbon films using ERDA/RBS, TOF-ERDA and Raman spectroscopy [J].
Cekada, M. ;
Kahn, M. ;
Pelicon, P. ;
Siketic, Z. ;
Radovic, I. Bogdanovic ;
Waldhauser, W. ;
Paskvale, S. .
SURFACE & COATINGS TECHNOLOGY, 2012, 211 :72-75
[23]   STRUCTURAL CHARACTERIZATION OF AMORPHOUS HYDROGENATED CARBON AND CARBON NITRIDE FILMS DEPOSITED BY PLASMA-ENHANCED CVD [J].
FREIRE, FL ;
MARIOTTO, G ;
BRUSA, RS ;
ZECCA, A ;
ACHETE, CA .
DIAMOND AND RELATED MATERIALS, 1995, 4 (04) :499-502
[24]   V and N co-doped diamond-like carbon films deposited by pulsed bias arc ion plating [J].
Li, Hongkai ;
Hu, Juan ;
Lin, Guoqiang ;
Dong, Chuang .
INTERNATIONAL JOURNAL OF REFRACTORY METALS & HARD MATERIALS, 2010, 28 (04) :544-549
[25]   Signature of Misoriented Bilayer Graphenelike and Graphanelike Structure in the Hydrogenated Diamond-Like Carbon Film [J].
Ray, Nihar R. ;
Datta, Jagannath ;
Biswas, Hari S. ;
Datta, Someswar .
IEEE TRANSACTIONS ON PLASMA SCIENCE, 2012, 40 (07) :1789-1793
[26]   Bonding in hydrogenated diamond-like carbon by Raman spectroscopy [J].
Casiraghi, C ;
Piazza, F ;
Ferrari, AC ;
Grambole, D ;
Robertson, J .
DIAMOND AND RELATED MATERIALS, 2005, 14 (3-7) :1098-1102
[27]   Hydrogen plasma etching of diamond films deposited on graphite [J].
Villalpando, I. ;
John, P. ;
Porro, S. ;
Wilson, J. I. B. .
DIAMOND AND RELATED MATERIALS, 2011, 20 (5-6) :711-716
[28]   INFLUENCE OF PLASMA PRETREATMENT IN THE FORMATION OF DIAMOND-LIKE CARBON THIN FILMS [J].
Maheswaran, R. ;
Ramaswamy, Shivaraman ;
Mahapatra, Ojas ;
Rao, B. Purnachandra ;
Gopalakrishnan, C. ;
Thiruvadigal, D. John .
SURFACE REVIEW AND LETTERS, 2009, 16 (06) :881-886
[29]   Characteristics of TiN films deposited on a trench-shaped sample prepared by plasma-based ion implantation and deposition [J].
Ma, XX ;
Tang, GZ ;
Sun, MR ;
Yukimura, K .
SURFACE & COATINGS TECHNOLOGY, 2005, 196 (1-3) :100-103
[30]   Characterization of Diamond-like Carbon (DLC) films deposited by RF ICP PECVD method [J].
Oleszkiewicz, Waldemar ;
Kijaszek, Wojciech ;
Gryglewicz, Jacek ;
Zakrzewski, Adrian ;
Gajewski, Krzysztof ;
Kopiec, Daniel ;
Kamyczek, Paulina ;
Popko, Ewa ;
Tlaczala, Marek .
ELECTRON TECHNOLOGY CONFERENCE 2013, 2013, 8902
12345