RADIATION EFFECT ON FLUORINATED SiO2 FILMS

被引:0
|
作者
张国强
严荣良
余学锋
高文钰
任迪远
赵元富
胡浴红
王英民
机构
关键词
Threshold voltage; Oxide trapped charge; Interface state; Radiation;
D O I
暂无
中图分类号
O571 [原子核物理学];
学科分类号
0827 ; 082701 ;
摘要
RADIATIONEFFECTONFLUORINATEDSiO_2FILMS¥ZhangGuoqiang(张国强);YanRongliang(严荣良);YuXuefeng(余学锋);GaoWenyu(高文钰);RenDiyuan(任迪远)(Xinji...
引用
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页码:124 / 128
页数:5
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