Structural and optical properties of tungsten-doped vanadium dioxide films

Thin films of tungsten(W)-doped thermochromic vanadium dioxide(VO2) were deposited onto soda-lime glass and fused silica by radio frequency magnetron sputtering.The doped VO2 films were characterized by X-ray diffraction,optical transmittance measurement,and near field optical microscopy with Raman spectroscopy.X-ray diffraction patterns show that the(011) peak of W-doped thermochromic VO2 film shifts to a lower diffraction angle with the increase of W concentration.The optical measurements indicated that the transmittance change(△T) at wavelength of 2500 nm drops from 65%(T at 35℃ and 80℃ for undoped VO2 film) to 38%(T at 30℃ and 42℃ for the doped VO2 film).At the same time,phase transition temperature drops from 65℃ to room temperature or lower with the increase of W concentration.Near field optical microscopy image shows that the surface of W-doped VO2 film is smooth.Raman results show that the main Raman modes of W-doped VO2 are centered at 614 cm1,the same as that of undoped VO2,suggesting no Raman mode changes for lightly W-doped VO2 at room temperature,due to no phase transition appearing under this condition.