AFM Studies of Platinum Silicide Thin Films on Silicon Grown by Pulsed Laser Deposition

被引：0
|
作者：
Meicheng LI
机构：
来源：
JournalofMaterialsScience&Technology | 2002年 / 01期
关键词：
PtSi; Thin films; PLD; AFM;
D O I：
暂无
中图分类号：
TB43 [薄膜技术];
学科分类号：
0805 ;
摘要：
PtSi ultra-thin films were grown on Si-wafer using pulsed laser deposition (PLD). The surface structure of these films was studied by atomic force microscopy (AFM). In addition, the compositional structure of the PtSi as determined from X-ray photoelectron spectroscopy (XPS) is discussed. First report of a possible growth mechanism is presented, on studying the variation of morphological features (i.e., roughness and size of crystallites) with annealing temperatures and the film thicknesses.
引用
收藏
页码：24 / 26
页数：3
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