The concept of biosensor based on imaging ellipsometry and its primal working system was reported in 1995. Since then, some microarray biosensors for biomedical purposes have been developed. It based on the affinity between biomolecule such as antigen and antibody, a selective surface with bioactivity in matrix and optical imaging ellipsometry as a reader. The selective surface on a solid substrate could be used to detect some proteins in a mixed solution such as serum, urine and cell exudate, etc. The surface was processed with surface modification, surface patterning,