DEPOSITION OF DIAMOND FILMS BY DC ARC PLASMA JET METHOD

被引:0
作者
白亦真
吕宪义
金曾孙
邹广田
机构
[1] Institute of Atomic and Molecular Physics
[2] Jilin University
[3] PRC
[4] Changchun 130023
关键词
DC arc; plasma jet; diamond film;
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中图分类号
学科分类号
摘要
Diamond has aroused people’s great interest due to its excellent physical and chemical properties. The development of various low-pressure synthesis methods has offered a bright future to its wide application in many fields. However, the growth rates of the conventional
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页码:552 / 555
页数:4
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