“Isara400”超精密坐标测量机的设计与标定(英文)

被引:6
作者
Henny Spaan
Ivo Widdershoven
Rilpho Donker
机构
[1] IBSPrecisionEngineering,Esp,AD,Eindhoven,TheNetherlands
关键词
纳米技术; 坐标测量机; 接触探针; 标定;
D O I
暂无
中图分类号
TH721 [坐标器和自动坐标器];
学科分类号
摘要
介绍了Isara 400 3维超精坐标测量机标定的关键技术,包括平台标定和系统镜面台非垂直度标定。同时,提出了一种新的超精接触探针系统,给出了这种3维灵敏度探针的标定结果。
引用
收藏
页码:2236 / 2241
页数:6
相关论文
共 4 条
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  • [2] Ultra Precision Coordinate Meas-uring Machine–Design,Calibration and ErrorCompensation. RUIJL T A M. . 2001
  • [3] Fullarea calibration of large optical flats. EVANS C J,SMITH C,SOOBITSKY J,et al. Proceed-ings of the ASPE spring topical conference . 2009
  • [4] Isara 400:development of an ultra-precision CMM for3Dmeasurement of large parts. HENNY A M,RILPHO L,IVO WIDDERSHOVEN. Proceedings of theASPE Spring Topical Conference . 2009