Oriented Growth of PZT thick film embedded with PZT nanoparticles

被引：4

作者：

段中夏 ^{[1
]}

袁杰 ^{[2
]}

赵全亮 ^{[1
]}

路冉 ^{[1
]}

曹茂盛 ^{[1
]}

机构：

[1] School of Materials Science and Engineering,Beijing Institute of Technology

[2] School of Information Engineering,Centre University for Nationality

来源：

Journal of Harbin Institute of Technology(New series) | 2009年 / 02期

基金：

中国国家自然科学基金;

关键词：

PZT; sol-gel; thick film; oriented growth;

D O I：

暂无

中图分类号：

TN304.055 [];

学科分类号：

0805 ; 080501 ; 080502 ; 080903 ;

摘要：

This paper reports that dense and crack-free(100)oriented lead zirconate titanate(Pb(Zr0.52Ti0.48)O3,PZT)thick film embedded with PZT nanoparticles has been successfully fabricated on Pt/Cr/SiO2/Si substrate by using PT transition layer and PVP additive.The thick film possesses single-phase perovskite structure and perfectly(100)oriented.The(100)orientation degree of the PZT films strongly depended on annealing time and for the 4 μm-thick PZT film which was annealed at 700 ℃ for 5 min is the largest.The(100)orientation degree of the PZT thick film gradually strengthen along with the thickness of film decreasing.The 3 μm-thick PZT thick film which was annealed at 700 ℃ for 5 min has the strongest(100)orientation degree,which is 82.3%.

引用

页码：232 / 236

页数：5

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