Oriented Growth of PZT thick film embedded with PZT nanoparticles

被引:4
|
作者
段中夏 [1 ]
袁杰 [2 ]
赵全亮 [1 ]
路冉 [1 ]
曹茂盛 [1 ]
机构
[1] School of Materials Science and Engineering,Beijing Institute of Technology
[2] School of Information Engineering,Centre University for Nationality
基金
中国国家自然科学基金;
关键词
PZT; sol-gel; thick film; oriented growth;
D O I
暂无
中图分类号
TN304.055 [];
学科分类号
0805 ; 080501 ; 080502 ; 080903 ;
摘要
This paper reports that dense and crack-free(100)oriented lead zirconate titanate(Pb(Zr0.52Ti0.48)O3,PZT)thick film embedded with PZT nanoparticles has been successfully fabricated on Pt/Cr/SiO2/Si substrate by using PT transition layer and PVP additive.The thick film possesses single-phase perovskite structure and perfectly(100)oriented.The(100)orientation degree of the PZT films strongly depended on annealing time and for the 4 μm-thick PZT film which was annealed at 700 ℃ for 5 min is the largest.The(100)orientation degree of the PZT thick film gradually strengthen along with the thickness of film decreasing.The 3 μm-thick PZT thick film which was annealed at 700 ℃ for 5 min has the strongest(100)orientation degree,which is 82.3%.
引用
收藏
页码:232 / 236
页数:5
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