EFFECT OF Ti ON MICROSTRUCTURE OF STEEL 321 FILM SYNTHESIZED BY MAGNETRON SPUTTERING DEPOSITION

被引：0

作者：

YANG Dejun ZHOU Honghui LI Huiqin University of Science and Technology Beijing

机构：

来源：

Acta Metallurgica Sinica(English Letters) | 1993年 / 11期

关键词：

magnetron sputtering; stainless steel film; Ti; microstructure;

D O I：

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学科分类号：

摘要：

Effect of increasing content of Ti on the crystalline-to-amorphous transition in alloy filmof stainless steel 321 plus Ti synthesized by high rate magnetron sputtering deposition isreported.X-ray diffraction analysis revealed that the microstructure of film was sequentlychanged from α-Fe,α-Fe-X-phase,microcrystalline+amorphous into amorphous withincreasing content of Ti fiom 0—3,3—10,10—18 and 18—30 wt-% respectively.

引用

页码：383 / 386

页数：4