Scanned-cantilever atomic force microscope with large scanning range

被引：4

作者：

杨金涛

徐文东

机构：

[1] Shanghai 201800

[2] Shanghai Institute of Optics and Fine Mechanics Chinese Academy of Sciences

来源：

Chinese Optics Letters | 2006年 / 10期

关键词：

AFM; mode; Scanned-cantilever atomic force microscope with large scanning range;

D O I：

暂无

中图分类号：

O562 [原子物理学];

学科分类号：

070203 ; 1406 ;

摘要：

A scanned-cantilever atomic force microscope (AFM) with large scanning range is proposed, which adopts a new design named laser spot tracking. The scanned-cantilever AFM uses the separate flexure x-y scanner and z scanner instead of the conventional piezoelectric tube scanner. The closed-loop control and integrated capacitive sensors of these scanners can insure that the images of samples have excellent linearity and stability. According to the experimental results, the scanned-cantilever AFM can realize maximal 100×100 (μm) scanning range, and 1-nm resolution in z direction, which can meet the requirements of large scale sample testing.

引用

页码：580 / 582

页数：3

共 8 条

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