The use of Ni-rich TiNiHf alloys as high temperature shape memory alloys (SMAs) through aging has been presented. For Ni-rich Ti80-xNixHf20 alloys, their phase transformation temperatures are averagely increased more than 100 K by aging at 823 K for 2 h. Especially for the alloys with Ni-content of 50.4 at. pct and 50.6 at. pct, their martensitic transformation start temperatures (MS) are more than 473 K after aging. TEM observation confirmed that some fine particles precipitate from the matrix during aging. The aged Ni-rich TiNiHf SMAs show the better thermal stability of phase transformation temperatures than the solution-treated TiNiHf alloys. The fine particles precipitated during aging should be responsible for the increase of phase transformation temperatures and its high stability.