Low-loss wide-bandwidth planar transmission line with a laminated conductor

In this paper, the laminated conductor technology is first introduced to planar-integrated transmission lines. The laminated conductor is composed of multilayers of metal and insulator, which has a lower conductor loss than a solid conductor. Based on the silicon-based micro electromechanical system technology,a laminated coplanar waveguide(CPW) with wide bandwidth and low loss is proposed, which uses a laminated conductor for signal lines and grounds. A laminated CPW and its transition are designed, fabricated,and measured. The simulation results show that the laminated CPW with many insulator layers has a low conductor loss. The measurement results illustrate that the average insertion loss of the laminated CPW is0.65 d B from DC to 40 GHz, which is 44.4% smaller than that of the solid CPW.