Light-extraction enhancement of freestanding GaN-based flip-chip light-emitting diodes using two-step roughening methods

被引:0
作者
安铁雷 [1 ]
孙波 [1 ]
魏同波 [1 ]
赵丽霞 [1 ]
段瑞飞 [1 ]
廖元勋 [2 ]
李晋闽 [1 ]
伊福廷 [2 ]
机构
[1] Institute of Semiconductors, Chinese Academy of Sciences
[2] Institute of High Energy Physics, Chinese Academy of Sciences
基金
中国国家自然科学基金;
关键词
freestanding GaN; flip chip; LED; CsCl; wet etching; light extraction;
D O I
暂无
中图分类号
TN312.8 [];
学科分类号
0803 ;
摘要
The light extraction enhancement of freestanding GaN-based flip-chip light-emitting diodes(FSFCLEDs)using two-step roughening methods is investigated.The output power of LEDs fabricated by using one-step and two-step roughening methods are compared.The results indicate that two-step roughening methods show more potential for light extraction.Compared with flat FS-FCLEDs,the output power of FS-FCLEDs with a nanotextured hemisphere surface shows an enhancement of 90.7%.
引用
收藏
页码:53 / 56
页数:4
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