An improved fabrication method for carbon nanotube probe

被引：0

作者：

徐宗伟 ^{[1
,2
]}

国立秋 ^{[3
]}

董申 ^{[1
]}

赵清亮 ^{[1
]}

机构：

[1] Precision Engineering Research Institute,Harbin Institute of Technology

[2] State Key Laboratory of Precision Measuring Technology & Instruments,Tianjin University

[3] School of Mechanical Engineering,Tsinghua University

来源：

JournalofHarbinInstituteofTechnology | 2008年 / 05期

关键词：

carbon nanotube (CNT); atomic force microscope (AFM); probe; fabrication;

D O I：

暂无

中图分类号：

TB383.1 [];

学科分类号：

070205 ; 080501 ; 1406 ;

摘要：

An improved arc discharge method is developed to fabricate the carbon nanotube probe. In this method, the silicon probe and the carbon nanotube were manipulated under an optical microscope. When the silicon probe and the carbon nanotube were very close, 30-60 V dc or ac was applied between them, and the carbon nanotube was divided and attached to the end of the silicon probe. Comparing with the arc discharge method, the new method need not coat the silicon probe with metal in advance, which can greatly reduce the fabrication difficulty and cost. The fabricated carbon nanotube probe exhibits the good property of high aspect ratio and can reflect the true topography more accurately than the silicon probe.

引用

页码：690 / 693

页数：4