An improved method of angle measurement with a position sensitive detector

被引：0

作者：

郑德锋 ^{[1
]}

王向朝 ^{[2
]}

唐锋 ^{[2
]}

机构：

[1] Information Optics Laboratory Shanghai Institute of Optics and Fine Mechanics,Chinese Academy of Sciences,Shanghai Graduate School of the Chinese Academy of Sciences,Beijing

[2] Information Optics Laboratory Shanghai Institute of Optics and Fine Mechanics,Chinese Academy of Sciences,Shanghai

来源：

Chinese Optics Letters | 2007年 / 07期

关键词：

An improved method of angle measurement with a position sensitive detector; length;

D O I：

暂无

中图分类号：

TH741.2 [];

学科分类号：

0803 ;

摘要：

<正>An improved method of angle measurement is proposed based on a parallel plate interferometer.A position detection system is incorporated into a parallel plate interferometer in order to realize large deflection angle measurement.A reflecting mirror is introduced for increasing the measurement resolution.In experiments, a deflection angle of a measured target was measured within～3°with high accuracy.And as a phase modulating interferometer,it was used to measure a small angular displacement with a repeatability of 5.5×10-8rad.

引用

页码：403 / 406

页数：4