Structure and magneto-electrical properties of Fe-C films prepared by magnetron sputtering

被引：0
作者：
MA Lei 1
2 School of Materials Science and Engineering
3 Department of Materials Science and Engineering
机构：
来源：
Science China(Physics,Mechanics & Astronomy) | 2012年 / Mechanics & Astronomy)2012卷 / 09期
基金：
中国国家自然科学基金; 中央高校基本科研业务费专项资金资助;
关键词：
carbon films; Fe-doped DLC films; magnetoresistance; magnetron sputtering;
D O I：
暂无
中图分类号：
O484.1 [薄膜的生长、结构和外延];
学科分类号：
080501 ; 1406 ;
摘要：
Fe-doped amorphous Fe x C 1 x granular films were prepared on n-Si(100) substrates by d.c.magnetron sputtering.The structural properties of Fe x C 1 x films were investigated by X-ray diffraction(XRD),atomic force microscope(AFM) and Raman spectroscopy.The results show that the iron and carbon of as-deposited films are in amorphous state,and the Fe x C 1 x films are diamond-like carbon(DLC) films.After doping iron into the DLC films,a smooth surface morphology of the Fe x C 1 x films has been obtained with the surface roughness Ra of about 0.231 nm for x=18at%.The Fe x C 1 x films have good soft magnetic properties with the coercivity of approximately 20 Oe.A high positive magnetoresistance(MR) up to 93% with x=1at% was observed in a Fe x C 1 x granular film at 300 K.The resistance characteristic of Fe-C films is changed at about 230 K and the positive MR effect can be understood by the p-n heterojunction theory.
引用
收藏
页码：1594 / 1598
页数：5
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