共 13 条
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- [2] Effect of substrate biasing and temperature on AlN thin film deposited by cathodic arcion[J] . Shakil Khan,Mazhar Mehmood,Shaukat Saeed,Taj. M. Khan,Gulfam Sadiq,Ishaq Ahmed.Materials Science in Semiconductor Processing . 2012
- [6] A comparative study of CrN x coatings Synthesized by dc and pulsed dc magnetron sputtering[J] . J. Lin,Z.L. Wu,X.H. Zhang,B. Mishra,J.J. Moore,W.D. Sproul.Thin Solid Films . 2008 (6)
- [7] Effects of depositing temperatures on structure and optical properties of TiO 2 film deposited by ion beam assisted electron beam evaporation[J] . Chen Yang,Huiqing Fan,Yingxue Xi,Jin Chen,Zhuo Li.Applied Surface Science . 2007 (9)
- [8] Influence of oxygen content on structure and hardness of Cr–N–O thin films prepared by pulsed laser deposition[J] . Tsuneo Suzuki,Jun Inoue,Hajime Saito,Makoto Hirai,Hisayuki Suematsu,Weihua Jiang,Kiyoshi Yatsui.Thin Solid Films . 2006 (4)
- [9] The effect of crystal structure and morphology on the optical properties of chromium nitride thin films[J] . S Logothetidis,P Patsalas,K Sarakinos,C Charitidis,C Metaxa.Surface & Coatings Technology . 2003
- [10] Preparation of Cr(N x ,O y ) thin films by pulsed laser deposition[J] . Tsuneo Suzuki,Hajime Saito,Makoto Hirai,Hisayuki Suematsu,Weihua Jiang,Kiyoshi Yatsui.Thin Solid Films . 2002 (1)