The Gas Nucleation Process Study of Anatase TiO2 in Atmospheric Non-Thermal Plasma Enhanced Chemical Vapor Deposition

被引：0

作者：

吴茂水 ^{[1
]}

徐雨 ^{[2
]}

戴林君 ^{[1
]}

王恬恬 ^{[1
]}

李雪 ^{[1
]}

王德信 ^{[2
]}

郭颖 ^{[1
,3
]}

丁可 ^{[1
,3
]}

黄晓江 ^{[1
,3
]}

石建军 ^{[1
,3
]}

张菁 ^{[1
,3
]}

机构：

[1] Department of Applied Physics,Donghua University

[2] College of Material Science,Donghua University

[3] Member of Magnetic Confinement Fusion Research Center,Ministry of Education,Donghua University

来源：

Plasma Science and Technology | 2014年 / 16卷 / 01期

基金：

中国国家自然科学基金;

关键词：

gas phase nucleation; TiO2; nanoparticles; plasma enhanced chemical vapor deposition(PECVD); 3D nanostructured films; atmospheric pressure;

D O I：

暂无

中图分类号：

TB43 [薄膜技术];

学科分类号：

0805 ;

摘要：

The gas phase nucleation process of anatase TiO2 in atmospheric non-thermal plasma enhanced chemical vapor deposition is studied. The particles synthesized in the plasma gas phase at di?erent power density were collected outside of the reactor. The structure of the collected particles has been investigated by field scanning electron microscope(FESEM), X-ray di?raction(XRD), high resolution transmission electron microscopy(HRTEM) and selected area electron di?raction(SAED). The analysis shows that uniform crystalline nuclei with average size of several nanometers have been formed in the scale of micro second through this reactive atmospheric plasma gas process. The crystallinity of the nanoparticles increases with power density. The high density of crystalline nanonuclei in the plasma gas phase and the low gas temperature are beneficial to the fast deposition of the 3D porous anatase TiO2 film.

引用

页码：32 / 36

页数：5

共 13 条

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