Supercritical carbon dioxide process for releasing stuck cantilever beams

被引：2
|
作者：
惠瑜 [1 ]
高超群 [1 ]
王磊 [1 ]
景玉鹏 [1 ]
机构：
[1] Integrated Circuit Advanced Process Center,Institute of Microelectronics,Chinese Academy of Sciences
来源：
半导体学报 | 2010年 / 31卷 / 10期
基金：
中国国家自然科学基金;
关键词：
SCCO2; sticking effect; release; cantilever beam; MEMS;
D O I：
暂无
中图分类号：
TN305 [半导体器件制造工艺及设备];
学科分类号：
1401 ;
摘要：
The multi-SCCO;（supercritical carbon dioxide） release and dry process based on our specialized SCCO;semiconductor process equipment is investigated and the releasing mechanism is discussed.The experiment results show that stuck cantilever beams were held up again under SCCO;high pressure treatment and the repeatability of this process is nearly 100%.
引用
收藏
页码：126 / 129
页数：4
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