THE DOPING EFFECT OF BORON ON GLOW DISCHARGE a-Si:H FILMS

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作者
吴汝麟
何宇亮
沈宗雍
机构
[1] Nanjing University
[2] Institute of Solid State Physics
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THE DOPING EFFECT OF BORON ON GLOW DISCHARGE a-Si; Si;
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摘要
We have studied the doping properties of boron in a-Si:H films prepared with glow discharge technique.In this paper we will explain our work in the following three sections.
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页码:1166 / 1169
页数:4
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