The properties of transparent conducting molybdenum-doped ZnO films grown by radio frequency magnetron sputtering

被引：0

作者：

修显武 ^{[1
]}

赵文静 ^{[2
]}

机构：

[1] School of Physics and Electronics,Shandong Normal University

[2] Jinan No Vocational School

来源：

ChinesePhysicsB | 2012年 / 21卷 / 06期

关键词：

molybdenum oxide; zinc oxide; magnetron sputtering; transparent conducting oxides;

D O I：

暂无

中图分类号：

O484.1 [薄膜的生长、结构和外延];

学科分类号：

080501 ; 1406 ;

摘要：

Transparent conducting molybdenum-doped zinc oxide films are prepared by radio frequency(RF) magnetron sputtering at ambient temperature.The MoO3 content in the target varies from 0 to 5 wt%,and each film is polycrystalline with a hexagonal structure and a preferred orientation along the c axis.The resistivity first decreases and then increases with the increase in MoO3 content.The lowest resistivity achieved is 9.2 × 10-4.cm,with a high Hall mobility of 30 cm2.V-1.s-1 and a carrier concentration of 2.3×1020 cm-3 at an MoO3 content of 2 wt%.The average transmittance in the visible range is reduced from 91% to 80% with the increase in the MoO3 content in the target.

引用

页码：413 / 416

页数：4