Spatial Carrier Bi-frequency Fourier Transform Profilometry for the 3-D Shape Measurement of Object with Discontinuous Height Steps

被引:0
作者
ZHONG Jingang
DI Hongwei
ZHANG Yonglin Deportment of Physics Jinan University Guangzhou China [510632 ]
机构
关键词
profilometry; bi-frequency; phase unwrapping; discontinuous height step;
D O I
暂无
中图分类号
TN24 [激光技术、微波激射技术];
学科分类号
0803 ; 080401 ; 080901 ;
摘要
The combination of shearing interferometer, Fourier-transform profilometry, phase unwrapping by lockup table method has resulted in a new and more powerful method of measuring surface profile. The technique permits the three-dimensional shape measurement of objects that have discontinuous height steps. Experimental results have demonstrated the validity of the principle.
引用
收藏
页码:121 / 127
页数:7
相关论文
共 4 条
[1]  
V. I. Gushov,Y. N. Solodkin.Automatic processing of fringe patterns in integerinterferometers. Optics and Lasers in Engineering . 1991
[2]  
J.H. Bruning,D. R. Herriott,J. E. Gallagher et al.Digital wavefront measurementinterferometer for testing optical surfaces and lenses. Applied Optics . 1974
[3]  
M. Takeda,K. Mutoh.Fourier transform profilometry for the automatic measurement of 3-Dobject shapes. Applied Optics . 1983
[4]  
M. Takeda,Q. Gu,M. Kinoshita et al.Frequency-multiplex Fourier-transformprofilometry: a single-shot three-dimensional shape measurement of objects with large heightdiscontinuities and/or surface isolations. Applied Optics . 1997