A study of radiation effects of 9 and 12 MeV protons on Chinese CMOS image sensor degradation

被引:3
作者
孟祥提 [1 ]
黄强 [1 ]
马艳秀 [1 ]
郑永男 [2 ]
范平 [2 ]
朱升云 [2 ]
机构
[1] Institute of Nuclear and New Energy Technology,Tsinghua University
[2] China Institute of Atomic Energy
基金
中国国家自然科学基金;
关键词
semiconductor technology; CMOS image sensor; proton irradiation; average brightness; TRIM simulation;
D O I
暂无
中图分类号
O572.341 [];
学科分类号
070202 ;
摘要
The 9 and 12 MeV proton irradiations of the Chinese CMOS Image Sensor in the fluence range from 1×109to 4×1010 cm-2and l×109to 2×1012 cm-2have been carried out respectively.The color pictures and dark output images are captured,and the average brightness of dark output images is calculated.The anti-irradiation fluence thresholds for 9 and 12 MeV protons are about 4×1010 and 2×1012 cm-2,respectively. These can be explained by the change of the concentrations of irradiation-induced electron-hole pairs and vacancies in the various layers of CMOS image sensor calculated by the TRIM simulation program.
引用
收藏
页码:442 / 445
页数:4
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