Micro Fork Hinge for MEMS Devices

Flexible beams are often used for rotation in MEMS (Micro Electro Mechanical Systems) devices to avoid the friction problems associated with hinge. However, the rotation angle of flexible beam is very limited and not enough for many applications. In this paper, we introduce a quasi hinge structure named as Fork Hinge, which has a larger equivalent rotation angle ({e.g.}10 times lager) and is more stable than the flexible hinge, while keeping its interesting properties. We develop an analytical model and simulate the Fork hinge behavior with FEM analysis. We find a good correlation with Fork Hinges fabricated using a SOI (Silicon on Insulator) wafer and DRIE (Deep Reactive Ion Etching).