Pull-in instability analyses for NEMS actuators with quartic shape approximation

被引：0
作者：
Junsheng DUAN [1 ]
Zongxue LI [2 ]
Jinyuan LIU [3 ]
机构：
[1] School of Sciences, Shanghai Institute of Technology
[2] College of Computer and Information, Inner Mongolia Medical University
[3] Department of Information Management, Party School of the Inner Mongolia Committee of the Communist Party of China
来源：
AppliedMathematicsandMechanics(EnglishEdition) | 2016年 / 37卷 / 03期
关键词：
micro-electromechanical system(MEMS); nano-electromechanical system(NEMS); Casimir force; pull-in instability; quartic shape function;
D O I：
暂无
中图分类号：
TH-39 [机电一体化]; TH703 [结构];
学科分类号：
080202 ; 080401 ; 080805 ; 0811 ; 0804 ; 081102 ;
摘要：
The pull-in instability of a cantilever nano-actuator model incorporating the effects of the surface, the fringing field, and the Casimir attraction force is investigated.A new quartic polynomial is proposed as the shape function of the beam during the deflection, satisfying all of the four boundary values. The Gaussian quadrature rule is used to treat the involved integrations, and the design parameters are preserved in the evaluated formulas. The analytic expressions are derived for the tip deflection and pull-in parameters of the cantilever beam. The micro-electromechanical system(MEMS)cantilever actuators and freestanding nano-actuators are considered as two special cases.It is proved that the proposed method is convenient for the analyses of the effects of the surface, the Casimir force, and the fringing field on the pull-in parameters.
引用
收藏
页码：303 / 314
页数：12
相关论文
共 50 条
[11]   Pull-in instability of electrostatic doubly clamped nano actuators: Introduction of a balanced liquid layer (BLL) [J].
Yazdanpanahi, E. ;
Noghrehabadi, A. ;
Ghalambaz, M. .
INTERNATIONAL JOURNAL OF NON-LINEAR MECHANICS, 2014, 58 :128-138
[12]   Pull-in parameter analysis for the cantilever NEMS actuator considering fringing field and Casimir effects [J].
Duan, Jun-Sheng .
PROCEEDINGS OF THE 2015 INTERNATIONAL CONFERENCE ON MECHANICS AND MECHATRONICS (ICMM 2015), 2016, :251-258
[13]   ANALYTICAL MODELING OF THE EFFECTS OF ELECTROSTATIC ACTUATION AND CASIMIR FORCE ON THE PULL-IN INSTABILITY AND STATIC BEHAVIOR OF TORSIONAL NANO/MICRO ACTUATORS [J].
Moeenfard, Hamid ;
Darvishian, Ali ;
Ahmadian, Mohammad Taghi .
INTERNATIONAL JOURNAL OF MODERN PHYSICS B, 2013, 27 (06)
[14]   Performance Analysis of Microsystems in the Presence of Pull-In Instability [J].
Ghiasi, Emran Khoshrouye .
2015 2ND INTERNATIONAL CONFERENCE ON KNOWLEDGE-BASED ENGINEERING AND INNOVATION (KBEI), 2015, :95-100
[15]   Modeling the effects of size dependence and dispersion forces on the pull-in instability of electrostatic cantilever NEMS using modified couple stress theory [J].
Abdi, J. ;
Koochi, A. ;
Kazemi, A. S. ;
Abadyan, M. .
SMART MATERIALS AND STRUCTURES, 2011, 20 (05)
[16]   Critical pull-in curves of MEMS actuators in presence of Casimir force [J].
McLellan, Brenda ;
Medina, Luciano ;
Xu, Chenmei ;
Yang, Yisong .
ZAMM-ZEITSCHRIFT FUR ANGEWANDTE MATHEMATIK UND MECHANIK, 2016, 96 (12) :1406-1422
[17]   Resonant pull-in condition in parallel-plate electrostatic actuators [J].
Fargas-Marques, Andreu ;
Casals-Terte, Jasmina ;
Shkel, Andrei M. .
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2007, 16 (05) :1044-1053
[18]   Nonlinear nonlocal pull-in instability of boron nitride nanoswitches [J].
A. Ghorbanpour Arani ;
M. Ghaffari ;
A. Jalilvand ;
R. Kolahchi .
Acta Mechanica, 2013, 224 :3005-3019
[19]   Inhomogeneous deformations and pull-in instability in electroactive polymeric films [J].
De Tommasi, Domenico ;
Puglisi, Giuseppe ;
Zurlo, Giuseppe .
INTERNATIONAL JOURNAL OF NON-LINEAR MECHANICS, 2013, 57 :123-129
[20]   Deflection and pull-in instability of nanoscale beams in liquid electrolytes [J].
Boyd, James G. ;
Lee, Jaesang .
JOURNAL OF COLLOID AND INTERFACE SCIENCE, 2011, 356 (02) :387-394
12345