Design and fabrication of sub-μs silicon-on-insulator thermo-optic 4×4 switch matrix

被引:0
作者
LI Yuntao YU Jinzhong CHEN Shaowu LI Yanping and CHEN Yuanyuan State Key Laboratory of Integrated Optoelectronics Institute of Semiconductor Chinese Academy of Sciences Beijing China [100083 ]
机构
关键词
SOI; Design and fabrication of sub; s silicon-on-insulator thermo-optic 4; switch matrix;
D O I
暂无
中图分类号
TN36 [半导体光电器件];
学科分类号
0803 ;
摘要
A rearrangeable nonblocking silicon-on-insulator-based thermo-optic 4×4 switch matrix with spot size converters (SSCs) and a new driving circuit are designed and fabricated. The introduction of a spot size converter (SSC) has decreased the insertion loss to less than 10dB and the new driving circuit has improved the response speed to less than 1μs.
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页码:241 / 242
页数:2
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