Deposition of diamond like carbon films by using a single ion gun with varying beam source

被引：0
|
作者：
姜金球
陈祝平
机构：
来源：
Journal of Coal Science & Engineering(China) | 2001年 / 01期
关键词：
ion beam deposition; diamondlike carbon; thin film; beam source; primary process;
D O I：
暂无
中图分类号：
P618.11 [煤];
学科分类号：
摘要：
Diamond like carbon films have been successfully deposited on the steel substrate, by using a single ion gun with varying beam source. The films may appear blue, yellow and transparent in color, which was found related to contaminants from the sample holder and could be avoided. The thickness of the films ranges from tens up to 200 nanometers, and the hardness is in the range 20 to 30 GPa. Raman analytical results reveal the films are in amorphous structure. The effects of different beam source on the films structure are further discussed.
引用
收藏
页码：80 / 83
页数：4
相关论文
共 50 条
  • [31] Deposition of diamond-like carbon using compact electron-beam-excited plasma source
    Tada, S
    Ito, M
    Hamagaki, M
    Hori, M
    Goto, T
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 2002, 41 (08): : 5408 - 5414
  • [32] Characterisation of a saddle field source for deposition of diamond-like carbon films
    Voevodin, AA
    Schneider, JM
    Caperaa, C
    Stevenson, P
    Matthews, A
    CERAMICS INTERNATIONAL, 1996, 22 (01) : 1 - 5
  • [33] Deposition of diamond-like carbon using compact electron-beam-excited plasma source
    Tada, Shigekazu
    Ito, Masafumi
    Hamagaki, Manabu
    Hori, Masaru
    Goto, Toshio
    1600, Japan Society of Applied Physics (41):
  • [34] Diamond-like carbon films with End-Hall ion source enhanced chemical vapour deposition
    Pan, Y. Q.
    Yin, Y.
    DIAMOND AND RELATED MATERIALS, 2007, 16 (02) : 220 - 224
  • [35] Hydrogenated diamond-like carbon films grown by a beam plasma source
    Amollo, Tabitha A.
    Wang, Keliang
    Baule, Nina
    Haubold, Lars
    Fan, Qi Hua
    DIAMOND AND RELATED MATERIALS, 2025, 154
  • [36] Optical and operational characteristics of diamond-like films deposited using a Hall ion beam source
    Baranov, A. N.
    Mikhailov, A. V.
    JOURNAL OF OPTICAL TECHNOLOGY, 2018, 85 (03) : 179 - 181
  • [37] Deposition process of diamond like carbon films
    Cheng, Yuhang
    Wu, Yiping
    Chen, Jianguo
    Qiao, Xueliang
    Xie, Changsheng
    Gongneng Cailiao/Journal of Functional Materials, 1998, 29 (01): : 54 - 57
  • [38] Characterization of diamond-like carbon films prepared using various source gases by plasma-based ion implantation and deposition
    Nakao, Setsuo
    Choi, Junho
    Sonoda, Tsutomu
    Kotake, Shigeo
    Yamada, Yasusei
    SURFACE & COATINGS TECHNOLOGY, 2018, 355 : 136 - 142
  • [39] Characteristics of carbon nitride films synthesized by single-source ion beam enhanced deposition system
    Appl Phys Lett, 9 (1291):
  • [40] Diamond-Like Carbon Film Deposition Using DC Ion Source with Cold Hollow Cathode
    Shevchenko, E. F.
    Tarala, V. A.
    Shevchenko, M. Yu.
    Titarenko, A. A.
    ADVANCES IN MATERIALS SCIENCE AND ENGINEERING, 2014, 2014
12345