Deposition of diamond like carbon films by using a single ion gun with varying beam source

被引：0
|
作者：
姜金球
陈祝平
机构：
来源：
Journal of Coal Science & Engineering(China) | 2001年 / 01期
关键词：
ion beam deposition; diamondlike carbon; thin film; beam source; primary process;
D O I：
暂无
中图分类号：
P618.11 [煤];
学科分类号：
摘要：
Diamond like carbon films have been successfully deposited on the steel substrate, by using a single ion gun with varying beam source. The films may appear blue, yellow and transparent in color, which was found related to contaminants from the sample holder and could be avoided. The thickness of the films ranges from tens up to 200 nanometers, and the hardness is in the range 20 to 30 GPa. Raman analytical results reveal the films are in amorphous structure. The effects of different beam source on the films structure are further discussed.
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页码：80 / 83
页数：4
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