Preparation and Characterization of PZT Piezoelectric Thick Film Generation Materials Enhanced by PZT Nanoparticles

The use of piezoelectric materials to capitalize on the ambient vibrations surrounding a system is one method that has seen a dramatic rise in use for power harvesting.Lead zirconate titanate,one of the most popular piezoelectric materials,has larger piezoelectric response than piezoelectric materials,such as ZnO and AlN.Ferroelectric films are suitable for vibration energy harvesting.Dense and crack-free(100)oriented PZT piezoelectric thick film is prepared on Pt/Cr/SiO2/Si substrate by sol-gel using PZT nanoparticles as reinforcing phase.The thick film possesses single-phase perovskite structure and perfectly(100)oriented.The influences of crystalline and amorphous PZT nanoparticles on the(100)oriented degree and the influences of the molar concentration ratio of amorphous PZT nanoparticles and PZT sol on surface morphology of PZT piezoelectric thick film are investigated.Experimental results show that,amorphous PZT nanoparticles are more helpful than the crystalline nanoparticles for the PZT thick film preferred orientation growth along the(100)direction.The 3μm-thick PZT thick film enhanced by amorphous PZT nanoparticles annealed at 700℃for 5min has the strongest(100)orientation degree,being 82.3%,and the surface is dense,smooth and crack-free.