Air-coupled piezoelectric micromachined ultrasonic transducers for surface stain detection and imaging

被引：0

作者：

Sheng Sun

Jianyuan Wang

Yuan Ning

Menglun Zhang

机构：

[1] StateKeyLaboratoryofPrecisionMeasuringTechnologyandInstruments,TianjinUniversity

来源：

Nanotechnology and Precision Engineering | 2022年 / 5卷 / 01期

关键词：

D O I：

暂无

中图分类号：

TB552 [超声换能器];

学科分类号：

0702 ; 070206 ;

摘要：

This paper proposes an air-coupled piezoelectric micromachined ultrasonic transducer(PMUT) for detection and imaging of surface stains.A 508 kHz PMUT array is designed, fabricated, and characterized in terms of its electrical and acoustic properties, and it is used in a pulse echo validation test. Imaging of stains on metal blocks is successfully demonstrated. Compared with existing optical methods for stain detection,the proposed approach can work in a dark environment without color requirements. This work provides a new and promising route for the development of miniaturized stain detection systems.

引用

页码：39 / 46

页数：8

共 6 条

[1] Piezoelectric Micromachined Ultrasonic Transducer With Superior Acoustic Outputs for Pulse-Echo Imaging Application [J].

Fu, Yuedong ;

Sun, Sheng ;

Wang, Zhuochen ;

Niu, Pengfei ;

Zhang, Menglun ;

Chen, Shili ;

Pang, Wei .

IEEE ELECTRON DEVICE LETTERS, 2020, 41 (10) :1572-1575

[2] Monolithic Single PMUT-on-CMOS Ultrasound System With+17 dB SNR for Imaging Applications [J].

Zamora, Ivan ;

Ledesma, Eyglis ;

Uranga, Arantxa ;

Barniol, Nuria .

IEEE ACCESS, 2020, 8 :142785-142794

[3]

Radius of Curvature Measurement Using Piezoelectric Micromachined Ultrasonic Transducers.[J].Pala S.;Liang Y.;Eovino B.;Shao Z.;Lin L..Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS).2020,

[4] High-SPL Air-Coupled Piezoelectric Micromachined Ultrasonic Transducers Based on 36% ScAlN Thin-Film [J].