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- [1] An Interface ASIC for MEMS Vibratory Gyroscopes With a Power of 1.6 mW,92 dB DR and 0.007°/s/√Hz Noise Floor Over a 40 Hz Band .2 Rombach S,Marx M,Nessler S,et al. IEEE Journal of Solid-State Circuits . 2016
A Practical Pll-Based Drive Circuit with Ultra-Low-Noise Tia for Mems Gyroscope
被引：3
作者：
CHEN Hua
[1
]
ZHONG Yanqing
[1
]
MENG Zhen
[1
]
机构：
[1] Institute of Microelectronics,Chinese Academy of Sciences
基金：
中国国家自然科学基金;
关键词：
MEMS Gyroscope;
Interface Circuit;
Driving Loop;
PLL;
TIA;
D O I：
10.15878/j.cnki.instrumentation.2017.03.002
中图分类号：
TH824.3 [];
学科分类号：
0804 ;
080401 ;
081102 ;
摘要：
A novel phase-locked loop( PLL)-based closed-loop driving circuit with ultra-low-noise trans-impedance amplifier( TIA) is proposed. The TIA is optimized to achieve ultra-low input-referred current noise. To track drive-mode resonant frequency and reduce frequency jitter of actuation voltage,a PLL-based driving technique is adopted. Implemented on printed circuit board( PCB),the proposed driving loop has successfully excited MEMS element into resonance,with a settling time of 3 s. The stable frequency and amplitude of TIA output voltage are 10.14 KHz and 800 mVPP,respectively. With sense-channel electronics,the gyroscope exhibits a scale factor of 0.04 mV/°/s and a bias instability of 57.6°/h,which demonstrates the feasibility of the proposed driving circuit.
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页码：7 / 13
页数：7
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