Numercial Simulation for Plasma Stream of ECR Plasma Source

被引：0

作者：

Guo Sheyu Ning Zhaoyuan Institute of Plasma Physics Academia Sinica Hefel Anhul ^{[230031
]}

机构：

来源：

真空科学与技术 | 1992年 / Z1期

关键词：

ECR; Numercial Simulation for Plasma Stream of ECR Plasma Source; Simulation;

D O I：

10.13922/j.cnki.cjovst.1992.z1.011

中图分类号：

学科分类号：

摘要：

<正> Using a Monte Carlo method and resonable data in our experiment device, we simulate the plasma stream of ECR plasma source on condition that the plasma is collisionless. We can get the distribution of ion density and the effect of magnetic field on the plasma along the divergent magnetic field. The research is beneficial to plasma processing applications.

引用

页码：111 / 114

页数：4