<正> The sharp luminescent peaks in Yb and Er-implanted InP,SI-InP,GaAs,and n-GaAs were observed at77K.The peaks at 1.0 and 1.5μm come from(4f)2F5/2→2F7/2of Yb3+and 4I13/2→4I15/2of Er3+,respectively.The optimum luminescent intensities can be obtained from Yb-implanted and Er-implanted sam-ples which were annealed at 800 and 750℃,respectively.A ccording to the analyses of PL and the rocking curveof X-ray double crystal diffraction,the best crystal structure of implanted InP layer has been obtained by an-nealing at 850℃.The interaction between Yb3+and Er3+in the SI-InP has been investigated for the first time.The quenching effect of Yb3+and Er3+with each other has been observed when the doses of Yb and Er-im-planted SI-InP are equal.